AJA Orion, installation notes, 2008-01-14 -- 16

Unstructured, no particular order or priority.

• Baratron size set in software, 100 mTorr conversion factor, must always be set.
• Baratron needs 6 hours of vacuum to warm up and show correct reading.
• Ramp RF power up and down, important to avoid risk for cracking of targets due to quick thermal change.
• In software note that power is given in percent (%) of full power! This cannot be changed!
• VAT (trademark) = Adaptive (Automatic) Pressure Controller, valve between main chamber and main turbo, feedback system keeps pressure at set level.
• Do bot open gate valve (valve between load lock and main chamber) when pressure difference is larger than 10^-2 mTorr.
• When loading sample holder, do not push down too far, lift up a little so there is a small gap.
• Manually rotate anchor (three fingers) into substrate holder.
  Lift up a little, check for no wobble when rotating the holder.
• Rotation must always be on when heating holder.
• It is good practice to always rotate substrate holder as soon as it is loaded.
• Always leave load lock pumping when substrate holder is loaded.
• CM-gauge reads correct for argon.
• Gas-inlet #2 is intended for oxygen.
• Vent normally: Leave software on
  shut off main turbo
  this autmatically opens vent valve on turbo
  wait a couple of minutes
  slowly open manual ventvalve on left side of main chamber
• Important to insert power cable fully into connector on back of sputter guns. Otherwise there will be serious problems striking plasma.
• Computer control, create layer (recipes).
  Heating: Soak time = wait at set point temperature this time before starting next step.
  In Ceate layer window:
    Heat, pressure and gasflow are first set
    then switches, RF and DC power are set
• Shutter carry over = shutter stays open into next step (Layer).
• Layers are combined into a Process. Each Layer is a step in the Process (compare Oxford Plasmalab 80+ RIE software).
• Installation adjustment of two shutters, they were too tight in closed position, too little argon leaked in over target to strike plasma. The shutters were lifted a little bit, loosening them on the backside, lifting the hinge.
• Different password to login to process-software. All passwords give same funtionality of software, but layers and processes (recipes) are totally separated for each password.

Load procedure

1. Check load lock valve is closed
2. Pump down load lock by turning on power (should already be on).
3. Wait until pressure difference is less than 10^-2 Torr.
4. Wait until load lock turbo is at full speed, 1500 Hz.
5. Open load lock valve.
6. Check height, around 20 is good.
7. Insert transfer rod.
8. Stop rotation.
9. Line up sample plate to transfer holder by manually rotating the holder.
10. Clips on holder are going to the sides of the transfer holder.
11. One slit should be pointing directly at the view port.
12. Lower height, check in viewport.
13. Do not push down on transfer holder, leave a small gap.
14. Rotate by hand to get cross (anchor) insert into substrate holder, it should be fully in, there is resistance when it is rotated fully into the holder.
15. Lift up to about 30.
16. Check for no wobble by starting rotation.
17. Drag back transfer rod
18. Close load lock valve
19. Leave load lock pumping, this gives you a faster unload.

• Kapton tape plus own glass on inside of viewport, protects against unwanted sputtering, own glass can be replaced. Kapton tape ok for vacuum.
• Cleaning inside of chamber:
  IPA plus lint-free wipe or IPA plus white scotch-brite
• Also clean holders and shutters, shutters can be removed from hinge by losening two screws.
• Cleaning of ground-shields can be done as above or with bead-blasting, preferrably aluminum-oxide beads, not glass beads.
• Warning! Always sputter with substrate holder loaded. Otherwise you sputter on glass in front of heaters, coating it.
• Do not clean with acetone unless careful drying. Aceton is difficult to pump out of chamber.

Heat auto-tune

1. Set rotary switch to OFF
2. Press left and right buttons simultaneously once.
   Top display should read SET
3. Press right button 33 (!) times until top display reads SP.ñd
4. Lower display text should be PY2
5. Press right button until lower display shows SP1.2
6. Press left and right simultaneously until back to normal display, showing set-point temperature and actual temperature.
7. Now setpoint can be changed with middle and right buttons.
   Set it to desired value.
8. Press left and right simultaneously until top display shows A_t
9. Press and hold down left button 3-5 seconds.
10. Turn rotary switch to ON.

Turn off heating auto tune and back to computer control

1. Set rotary switch to OFF
2. Press left and right buttons simultaneously once.
   Top display should read SET
3. Press right button 33 (!) times until top display reads SP.ñd
4. Lower display text should be SP1.2
5. Press middle button until lower display shows PY2
6. Press left and right buttons simultaneously several times to get back to normal display, showing setpoint and actual temperatures.
7. Set rotary switch to REM