Stage service, replacement of encoder wheel and optical sensor for X-axis

2010-09-28, Jonas Appelfeldt, FEI service.

 


Tilt motor must be unmounted.

 


The complete motor assembly must be unmounted.

 


X-axis to the left with only encoder wheel showing, the optical sensor has been unmounted. The other axis have both encoder wheels and optical read-out sensor in place.


Anders Liljeborg Nanostructure Physics, KTH.