AJA Orion sputtering system

Responsible: Taras Golod, Anders Liljeborg, Vladislav Korenivski

Overview of system components

User instructions

Mixer Ar/N2/O2 instructions

Replacement of sputter targets
Common errors

Technical note: Cooling water balancing

Manuals

RGAm, Residual Gas Analyzer manual, pdf (Mass spectrometer)
A300 SERIES, A3CV & CTM MAGNETRON SPUTTERING SOURCES, PDF
Adixen Pascal rotary vane oil pumps, pdf
ATC_and_ATC_ORION_MANUAL_-_NOV_2005.pdf
DCXS750-Specifications-V108a.pdf
GRANVILLE_PHILLIPS_274_NUDE_ION_GAUGE.pdf
GRANVILLE_PHILLIPS_307_GAUGE_CONTROLLER.pdf
HVA_Maint_Manual.pdf
HVA_Shipping_Manual.pdf
MAXTEK_TM-350,400_THICKNESS_MONITOR.pdf
MC-5manr_REV_3.pdf
MKS_627B_BARATRON.pdf
MKS_M10MB,M100B_MFC.pdf
McALLISTER_BLT_User's_Guide.htm
OGDEN_9300m_TEMP_CONTROLLER.pdf
PFEIFFER_DCU_OPERATIONS.pdf
PFEIFFER_DCU_PARAMETERS.pdf
PFEIFFER_TMU_071_TURBO_PUMP.pdf
PFEIFFER_TMU_521_TURBO_PUMP.pdf
PFEIFFER_TSF_010_VENT_KIT.pdf
PhaseIIJ_REV_1.pdf
SEREN_AT3_AUTO_MATCH_NETWORK.pdf
SEREN_MC2_AUTO_MATCH_CTRLR.pdf
SEREN_MM3X_MANUAL_MATCH_CTRLR.pdf
SEREN_R301_RF_POWER_SPLY.pdf
SHQ15A25Aman_REV_5.pdf
SHQ400Man_REV_2.pdf
TRANSFER_ENGINEERING_DBLOP-M_MAG_XFER_ARM.pdf
VAT_PM5_CONTROLLER.pdf
Installation notes
Anders Liljeborg Nanostructure Physics, KTH.