LIMS intro (PDF)

Equipment

      Lithography

      Imaging

      Etching

      Deposition

      Sample Prep.

      Characterisation

      AFM lab

      Service

Useful links

Usage and Safety

Usage fees
Lab user list (Excel file)
Activty Report 2008 (pdf)
Presentation 2011 (pdf)
Resist data limited access
Clean-room partcle count
Humidity and temp logs
Nano-Fab-Lab Wiki
Office Wiki
NanoFabLab users, phonelist
Service and labs, phonelist
Chemical database
SPM Dimension 3100