Actuated Probes

The Actuated Probe capability of the NanoScope V Controller is based on an Active Tip probe, which merges in a single component the essential microscope/sample interface element—the probe tip—with the vertical position control mechanism, a piezoelectric actuator (see Figure 1). A voltage applied across the Active Tip probe bond pads induces expansion (or contraction) of the piezoelectric material. Where the actuator material overlays the cantilever beyond the edge of the substrate, the cantilever is free to respond by lifting the tip away from the sample (or lowering it toward the sample).

Figure 1: Active Tip Probe

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