Stage Operation
The Dimension Icon XY stage provides positioning repeatability of 2 μm. The trackball response also makes it easier to locate features of interest for imaging.
The XY stage permits micrometer-scale positioning of samples beneath the tip with a 154 mm (X direction) by 185 mm (Y direction) travel range.
The Dimension Icon motorized Z-stage provides accurate, automatic tip engagement and approach. The rigidity of the Z-stage permits low noise and high accuracy imaging. A motorized lead screw drives the Z-stage for coarse approach of the scanner to the sample. This configuration allows you to image samples of different thicknesses with little difficulty.
Sample Size & Handling
Samples may be up to 200 mm (8 inch) diameter x 17 mm (0.67 inches) thick.
| Maximum sample size |
8-inch diameter x 0.65 inches thick (wafers and disk media) |
| Maximum sample weight |
1.0 lb (454 grams) |
| Inspectable area |
154 mm x 185 mm
Includes vacuum pump and interchangeable adapters for centering hard disks and removable wafer-locating pins.
|
| Small samples |
Magnetic holder available for mounting small samples on mounting pucks (typically < 15 mm diameter) |
| Silicon wafers |
Silicon dioxide-coated chuck accommodates 2 inch, 100 mm, 125 mm, 150 mm, and 200 mm wafers. |
| Wet samples |
Optional fluid cell allows immersion of microscope head to a maximum depth of 2 mm. |
| Chuck vacuum |
The chuck vacuum pneumatics secure samples to the chuck using the toggle switch at the upper right corner of the microscope. |
Table 1: Sample Specifications
Motor Interlock
SPM stage movement is software interlocked against motion in the absence of a valid (laser signal). The SUM signal must be between 0.5–9.5 volts. If it is outside this range, all commands to move the SPM in the X, Y, or negative Z (downward) directions will be blocked; only upward Z-stage travel will be allowed. This interlock reduces the possibility of inadvertently crashing the tip and scanner crystal into the sample or stage. If, during the engage sequence, the SUM signal changes to a value outside the interlocked limits, the downward motion stops, preventing possible damage to the scanner.
In order to understand proper stage operation, you must become familiar with:
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(laser signal). The SUM signal must be between 0.5–9.5 volts. If it is outside this range, all commands to move the SPM in the X, Y, or negative Z (downward) directions will be blocked; only upward Z-stage travel will be allowed. This interlock reduces the possibility of inadvertently crashing the tip and scanner crystal into the sample or stage. If, during the engage sequence, the SUM signal changes to a value outside the interlocked limits, the downward motion stops, preventing possible damage to the scanner.