The Dimension Icon system is designed to meet or exceed certain performance specifications, detailed in the table below.
| Parameter | Specification |
|---|---|
| XY Scan Range |
90 μm x 90 μm typical 85 μm minimum |
| Z Range |
10 μm typical in imaging and force curve modes 9.5 μm minimum |
| Vertical Noise Floor | < 30 pm RMS in appropriate environment, typical imaging bandwidth (up to 625 Hz) |
| XY Position Noise (Closed Loop) | ≤ 0.15 nm RMS typical imaging bandwidth (up to 625 Hz) |
| Z Sensor Noise Level |
35 pm RMS typical imaging bandwidth (up to 625 Hz) 50 pm RMS force curve bandwidth (0.1–5 kHz) |
| Integral Nonlinearity (XY) | < 0.50% |
| Integral Nonlinearity (Z) | < 0.50% |
| Sample Size/Holder | 210 mm vacuum chuck for samples ≤ 210 mm in diameter and ≤ 15 mm thick |
| Motorized Position Stage: X & Y Axis |
180 mm x 150 mm inspectable area with rotating chuck 2 μm unidirectional repeatability 3 μm bidirectional repeatability |
| Microscope Optics |
5-Megapixel digital camera 180–1465 μm viewing area Digital zoom and motorized focus |
| Controller/Software | NanoScope V/NanoScope v8.15 and later |
| Workstation | Integrates NanoScope V, Stage Controller, HV Amplifiers, computer, and provides an ergonomic design with immediate physical and visual access |
| Vibration isolation | Integrated (refer to Acoustic & Vibration Specifications) |
| Acoustic Isolation | Operational in environment with up to 85 dBC continuous acoustic noise |
| www.bruker.com | Bruker Corporation |
| www.brukerafmprobes.com | 112 Robin Hill Rd. |
| nanoscaleworld.bruker-axs.com/nanoscaleworld/ | Santa Barbara, CA 93117 |
| Customer Support: (800) 873-9750 | |
| Copyright 2010, 2011. All Rights Reserved. |