Policy for booking the E-beam lithography system
2005-11-10, revised 2018-05-14
The use of the E-beam system is sometimes quite heavy, it can be
difficult to get a
time-slot less than a week in advance, sometimes a booking has to be
two weeks in the future.
The general guide-lines are preliminary for the Voyager since
it has a much higher writing speed than the 150 tool:
Four 2-hour ebeam-sessions per weekday,
These times are maximum limits, if you need less time, please book
only that time.
On weekdays, after 17:00, bookings are more flexible, longer exposures
can be made etc.
During periods of heavy use it would be very convenient if users
doing overnight bookings could start as late as
possible. E.g. starting at 21:00 would give two
extra 2-hour ebeam session on a weekday-evening.
During weekends (Fri 17:00 - Mon 09:00) booking is more flexible.
Never book more than three sessions in advance! With a session is
meant either a 2-hour daytime session, or an overnight
session. This also applies to weekends. This implies that if you
book Saturday 13:00-15:00, 15:00-17:00, 17:00-overnight, you have used up all
three allowed advance bookings!
Always report a booking that cannot be used AS SOON AS POSSIBLE!
Use this mail adress to reach all users of the system:
Lab-manager, Albanova Nanofabrication Facility