Admin mode
Process Relay 1
Activation Control
Process Start
Process Relay 1 Delay
dstore 11: 5 sec.
dstore 12: 12 hrs.
Pressure Control
pstore 12: 1.0 e-5
pstore 13: 3.0 e-4
In this way the vacuum ok signal to EB3 Gun controller
becomes active
when chamber vacuum goes below 1.0×10-5 mbar.
The vacuum ok signal is valid up to 3.0×10-4 mbar. This "hysteresis" is necessary because outgassing is occurring during the e-gun deposition.