Admin mode Process Relay 1 Activation Control Process Start Process Relay 1 Delay dstore 11: 5 sec. dstore 12: 12 hrs. Pressure Control pstore 12: 1.0 e-5 pstore 13: 3.0 e-4In this way the vacuum ok signal to EB3 Gun controller becomes active when chamber vacuum goes below 1.0×10-5 mbar.
The vacuum ok signal is valid up to 3.0×10-4 mbar. This "hysteresis" is necessary because outgassing is occurring during the e-gun deposition.