Micro manipulators inside FEI Nova 200

Repsonsible: Taras Golod, Andreas Rydh

 

How to manufacture STM-tips / tips for micro manipulators Adrian Iovan

 

Two micro manipulators manufactured by Kleindiek are installed inside the FEI Nova 200 on a special extra base. Here is a brief user manual how to use these manipulators.

Please note! Reading this web-page is not enough to be able to use these manipulators in a safe way. You MUST receive training from a person responsible for these!

Here are the two manipulators mounted on the special extra base-plate installed inside the FEI Nova 200.
Each manipulator has three parts for each movment direction:
  • A: Left / Right movement
  • B: Up / Down movement
  • C: In / Out movement
The "Quickfoot" part is clamped to the special base plate with a screw and can be adjusted by the tool responsible person.

 

This is the controller for one of the manipulators, the three first knobs control the respective motion direction.

 

Here is a more convenient controller (which many of you may recognise). Both manipulators can be controlled with this. The two joy sticks control the motions as indicated.

 

Here is the On / Off button.

 

The speed of the motion is controlled by these two buttons.

Please note that the highest speed (6) can only be used when the stage is open for mounting samples etc.

When the stage is inside the chamber, the risk of pushing a tip into a column, a wall, your sample, etc. is 100%.

 

You can switch between the two manipulators with the right front button.

 

The driving principle is using a piezoelectric motor, a "NanoMotor" There are two modes this motor can operate in:

  1. Fine mode: 1 µm movment divided in 4095 steps in / out motion
    20 µm divided in 4096 steps left / right / up / down.
    This mode is used in speed ranges 1 and 2.

  2. Coarse mode: Ratchet motion, used in speed ranges 3 - 6.
Question for Andreas: how big is on step in coarse mode?

 

In order to take one coarse step (length of step depends on speed setting) you press one of the indicated buttons. Up / Down, Left / Right, In / Out ????

 

Considerations

  • Absolute positions are not available. There is no way to "go to home position" for any axis of the manipulator.
  • Exact size of step difficult to calculate.
  • Each nanocontrol for one manipulator, voltage needed to maintain position ??????
  • Maximum range in fine mode (1 µm in/out, 20 µm left/right, up/down.

 

 

Speed & control setting

The speed and which manipulator is active with the controller is indicated on the display (which display??????) As we have only two manipulators installed we only have left and right.

Use highest speed 6 ONLY with open load lock!

 

Vibration can be applied to the tip of the manipulator, this is very useful to decide when tip makes contact with sample surface.
  • Visual aid for fast and safe approach
  • Vibration amplitude decreases when in contact
  • Operate from controller box

 

Handling

Avoid applying pressure onto forks of the horizontal and vertical axes.

Pressure higher than 2 N will damage the high preceision bearings.

 

Handling

  • Only handle at back grip
  • Insert & remove tips for each use???????
  • Leave manipulators inside FIB
  • Park in safe positions

 

Handling

Do not get in touch with the delicate wires.

 

Handling tips

 

Preparing a new tip ‐ staff only

Please note that the actual tip (not visible in the picture) is welded to the side of the wire.

 

Mounting tip

Hold by white ring!

When inserting or removing a tip holder, point the vertical axis of the manipulator directly upward and hold the manipulator firmly by the white ring at the front of the linear axis. If access from above is restricted then either move the axis as far upward as it will go or point it directly downward. Use pliers to insert or remove the tip holder.

Insertion only a few mm!

 

Rotator

  • Length: 32 mm
  • Diameter: 4 mm
  • Weight: 2 g
  • Travel: 360° unlimited
  • Resolution: 0.1°
  • Torque: 0.01 mNm
  • Temperature range: 273 K to 353 K
  • Lowest pressure: 10-7 mbar

 

System view from above

Rotator is mounted to the right.

 

Manipulators are mounted on the base with friction fasteners — some adjustment possible.

 

Connectors and wires

Be careful with wires when loading and unloading.

Check there is enough range for tilts.

 

Needles / tips

Select tip depending on purpose

Do not destroy sharp tips (scratching, glue etc.)

FIB your own tip

Keep within known position:
retract and vent+reload if blind.

Rotation: tip at rotation axis, i.e. never mount an angled tip on the rotator

 

Position tips within 2 mm of center

Hard to see actual tips

May crash on:

  • Stub
  • Sample
  • Each other
  • Column

 

CCD camera view

View from inside of chamber

Watch when:

  • Loading
  • Rotating
  • Adjusting Z pos

Do not squeeze manipulators into column!

 

Locate needles after loading

Should be within 3 mm of stage center

If not visible:
Vent, reposition and reload

 

Check needle rotation orientation

Rotator needle may touch only when on the bottom side of the wire.

 

Rmember tip holder??????

Rotation tricky ???????

 

Tip shape

This is how fresh sharp tips should look like

 

Sharp tips — FIB:ed

 

Scratching deposited layers

 

Scratching...

Effect depends on speed and angle

 

Moving small objects

 

SEM-glue

Glue cured by the electron beam

Manipulate:
Less than 100 pA

Cure:
1 nA, 50,000 magn.
or zoom-window

Wait 1 minute

Bonding strength
2 mN

Fully cure:
High beam currents
Large voltages

  

  

Demo movies

  

http://www.nanotechnik.com/nanomanipulation.html

http://www.nanotechnik.com/mm3a-em.html

  

  


Andreas Rydh, Condensed Matter Physics, SU, Anders Liljeborg Nanostructure Physics, KTH.