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Helios 5 (Thermo Scientific, formely FEI) is a dual beam system for
3D imaging in nanomaterials science. High level of automation makes
3D characterization and sample perparation quick and easy.
The system is extra equipped with
- integrated Thermo Scientific
EasyLift NanoManipulator for high precision
-
low-drift in-situ liftout
- retractable
STEM detector for nano-analysis of thin samples
Some technical data:
- E-beam resolution:
- At optimum WD
- 0.6 nm at 30 kV STEM
- 0.7 nm at 1 kV
- 1.0 nm at 500 V (ICD)
- At coincidence point
- 0.6 nm at 15 kV
- 1.2 nm at 1 kV
- E-ebam current range 0.8 pA - 100 nA
- Accelerating voltage 350 V - 30 kV
- Ion beam
- Current range 1 pA - 100 nA
- Accelerating voltage range 500 V - 30 kV
- Resolution 2.5 nm at 30 kV (selective edge method)
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