Exporting data from the KLA Tencor P15 profiler

Data can be exported from the native profiler format (.dat-files) to ASCII files that can be imported into e.g. Excel.

 


Close measurement windows by clicking on the "Close" button (×-button) at the top right corner, until you get to this window.

Then click on Scan Data-button to the left, and the Export-button to the right.

 


Select your SCAN DATA-folder to find the native data files you want to export.
Select all the files you want to export.

 


Click the Export-button.
Select the directory where the exported files will be stored. Simplest is to select the directory where the original files are stored. Note that you always have to change this.
Check that the ASCII format is selected.

 


Here the directory with the original files is selected.

 


A close up for more clarity.

The text files can then be moved to the Nanolab server using WinSCP.

 


Please remember to reset the software to normal operation by clicking the Scan Recipe-button to the left and the Measurement-button to the right.

 


The exported text file is tab delimited with five columns. First four lines shows
  • data file name
  • which recipe was used for scanning the profile
  • number of data points
  • Distance in microns between each data point (step size).
Then there is a column heading. The Normal column is the one most useful.

Anders Liljeborg Albanova Nanofabrication Lab, KTH, SU.