First trial w. lift off using MRT mr-rem-400 (non-NMP)

In order to replace the 1165 Remover (which has harmful NMP) a first trial was done using Micro Resist Technology:s mr-rem-400.

Pattern is 25 nm lines, 25 nm space, thickness is 22 nm (gold).

Recipe for lift-off:

  1. heated bath of mr-rem-400, 60°C, 30 minutes.
  2. move beaker to ultrasound bath (RT), sonics for 15 minutes.
  3. replace mr-rem-400 bath for fresh mr-rem-400.
  4. repeate the first two steps.

 


Jussi Rahomäki, Anders Liljeborg Nanostructure Physics, KTH.