ZEP7000 spin curves

Made on 10 × 10 mm Si chips with 3 nm of Cr, baked for 30 minutes at 170°C in a convection oven.
The resist layer may be thinner for larger samples due to reduced edge effect.
There are two dilutions: 
    Nanolab A, ZEP : solvent = ~1 : 1
    Nanolab B, ZEP : solvent = ~2 : 1
There is also the undiluted resist. Please contact Jussi Rahomäki or Anders Holmberg about any other special cases.

Example of undiluted ZEP7000: 

    Clean SOI chip 12 × 12 mm
    3000 rpm
    bake on hotplate, 170°C, 3 minutes
    resist thickness ~200 nm

 



Jussi Rahomäki, BIOX, Anders Liljeborg Nanostructure Physics, KTH.