Service notes of RIE1 with oxygen/argon
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Delivered 1999.
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Turbo draws high current (1-2 A).
Re-greasing of turbo bearings 2001-12-12.
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Service by Löwener, cleaned turbo ball bearings, 2002-08-30.
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Service by Löwener, replaced turbo ball bearings, 2002-10-25.
Turbo draws 0.4 - 0.5 A.
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Turbo draws high current (1-2 A).
Re-greasing of turbo bearings 2005-02-27. Did not help, still
high current.
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Service by Löwener, replaced turbo ball bearings, 2005-03-01.
Turbo draws 0.4 - 0.5 A.
Manual, rough pump, Alcatel 2033
Re-greasing of turbo ball bearings
- Shut off system and computer
- Open right side panel
- Disconnect remote control cable from turbo controller
- Connect dummy connector for local operation,
"ACT600 Turbo Standalone"
- Turn on system, turbo controller should display KEYB
in upper left corner.
- Start computer
- Start PC2000 controlling software
- Log in as manager
- See to it that the whole system first is at equal pressure
and then vented before opening turbo for re-greasing.
Follow the scheme and illustration below to do that in a
safe way. Please note that the turbo is disconnected from remote control,
so it is no use trying to start it in this procedure. That is done manually
later at the run-in procedure.
- Goto SERVICE MODE
- All valves closed
- Start Ruff pump
- Open Chamber ruff valve
- Pump down to about 10 - 20 mTorr
- Close Chamber ruff valve
- Open Turbo ruff valve
- Wait 30 s
- Open Gate valve
- Open APC valve
- Close Turbo ruff valve
- Stop Ruff pump
- Open Vent valve
- When Process Interlock switches from OK to FAULT
there is about 0.5 atmosphere in chamber.
- Wait another 30 seconds
- Open turbo to start re-greasing procedure
The re-greasing has not really helped, the turbo has had to be sent away for
bearing replacement anyway.
Discussion with Löwener gives that particles from processing collects in the
bearing grease and stays there, even if more grease is put in.
More important is to check the current of the turbo, newly serviced
it draws about 0.45-0.50 A. Recommendation (from Löwener) is that
when it goes above 1 A it is time for some sort of service.
Run-in after re-greasing
Note that dummy-connector ACT600 Turbo Standalone
must be inserted at the back of the turbo controller.
It is necessary for the front-panel to be functional.
Detailed procedure is in turbo pump manual, Alcatel ATP series,
system KTH-417591, page E70, 2/3.
- Use + and -
to get RUNNING IN blinking
- Press ENTER
- Press ENTER to get X in
PROG:X blinking
- Press + to select run-in program 2
- Press ENTER
- Press + to change STOP to
START
- Press ENTER to start the run-in program
- Program takes about 2h30m to finish.
For finish status of run-in, see manual, page E70, 3/3
Anders Liljeborg
Nanostructure Physics, KTH.