Particle count in Albanova Nanolab	2020-03-12	2020-09-30
Made with one cycle of 2 minutes.
Particles per cubic foot (US FED STD 209E Cleanroom Standards)
Location	Count	Count
Office Erik H., Adrian I., Anders L.	13000	25800
Nanolab		0
Entrance, work area	28935	32200
Entrance, on bench	31030	29355
Process Lab
Center (table next to profiler)	3285	2200
At sink	7510	2755
Inside fumehood	7620	10205
On chair at RIE2 computer	2655	0
Cleanbench 1, (left), halfspeed	0	0
Cleanbench 1, (left), halfspeed, on grille	30	0
Cleanbench 2, halfspeed	0	0
Cleanbench 3, halfspeed	0	0
Cleanbench 4, halfspeed	0	0
Cleanbench 5, fan OFF
Cleanbench 5, halfspeed	0
Table at Plasmalab 100 (CryoRIE)	3660	2560
Processlab Service
In front of gasbox for RIE2	5700	8400
At short end	7480	9185
Ebeam Lab
LAF bench, sample mounting	0	0
SEM FEI/FIB, table, sample mounting	1945	2425
Service Ebeam/Deposition Lab	3525	5460
UHV/Deposition Lab
Eurovac, in front of loadlock	1160	815
At bonder	820	2720
At AJA Orion sputter	1260
AJa1 LAF		0
Yellow Lab, HFM:s off
At microscope, LAF=on	5670	6625
Inside LAF, LAF=on	0	0
Small triang. lab, fluor.micr.	2880	4450
AFM-lab
At Icon front	1860	3830
At FastScan front	3230	2645
Inside LAF, LAF=on, fullspeed for lights on	0	0