Temperature and relative humidity in Albanova Nanofabrication Facility.

 


 


 


 


 


 


 


 


 


 


 


 


 


 


 


 


 




Process Lab


 


 


 


De-humidifier was placed between the Ar/O2-RIE and the Cl2/BCl3-RIE in the morning of June 24.

 


 


 


 


 


 


 


 


 


 


 



Deposition Lab


 


 


 


 


 


 


 


 


 


 


 


 



Anders Liljeborg Nanostructure Physics, KTH.