| Original pattern. Click image for full resolution. |
| Original pattern. Click image for full resolution. |
| Parameter settings for the stage. |
|
Top half is detail of upper left part in overview image below.
Write field size indicated by black short lines. Ellips indicate vertical line at border of Write Field, not in original pattern. Probably due to not using "high resolution" stitching mode. Click image for full resolution. |
| Horizontal stitching accuracy about 1 µm. |
|
Vertical stitching accuracy about 1 µm.
Ellips indicate vertical line at border of Write Field, not in original pattern. Probably due to not using "high resolution" stitching mode. |