Spin coater Schaefer Tec SCE-15

Responsible: Anders Liljeborg

Max. 9000 rpm (150 rps) with small chucks.
Max. 5000 rpm (83 rps) with big (4 in.) chuck.

Top lid must always be attached to avoid resist droplets flying around inside the clean bench.

The vacuum is connected to same pump as for the EMS (old) spinner. Since there is no shut-off valve in the Schaefer Tec spinner there is a manual valve on the plastic hose going to the spinner. This must be opened before using the spinner.

The valve must be closed for the vacuum to work for the old spinner.

Front panel:

• Display showing rps (rotations per second)
• Start button
• Left potentiometer for ramp time, 15 s - 150 s.
• Middle potentiometer for total spin time (including ramp), 50 - >500 s.
• Right potentiometer for speed, 10 - 150 rps

Top lid is off to position sample or wafer on spin chuck.

Close-up of front panel when spinner is idle.

Spinner is accelerating, both LED:s are illuminated.

Spinner at speed, only green LED illuminated.

The three chucks supplied

• left one for small chips
• middle for wafers up to 50 mm
• right one for wafers up to 100 mm

Speed in RPM versus speed potentiometer. Ramp pot. at zero, Time pot. at zero.