Ebeam Litho, Carlos Errando-Herranz

Ring resonator tunable by electro mechanical deflection. The ring is deflected towards the bottom substrate by parallel-plate (capacitive) actuation. The ring waveguide is brought close to or more separated from an adjacent thin silicon beam. This changes the light mode in the ring, resulting in a phase shift and thus a change in resonance wavelength.

Grating coupler tunable by electro mechanical deflection. Actuation results in reduced separation to the substrate, thereby changing the interference pattern between the diffracted wave that diffracts upwards, and the wave diffracting downwards (that reflects upwards from the substrate).