Reconfigurable photonics with on-chip single-photon detectors
Photonic integrated circuits
Reconfigurability can allow quantum state preparation and quantum logic
On-chip single photon detection and generation
Reconfigurable photonics with on-chip single-photon detectors
Samuel Gyger, Julien Zichi, Lucas Schweickert, Ali W. Elshaari, Stephan Steinhauer, Saimon F. Covre da Silva, Armando Rastelli, Val Zwiller, Klaus D. Jöns & Carlos Errando-Herranz, https://doi.org/10.1038/s41467-021-21624-3
S
uperconducting
N
anowire
S
ingle
P
hoton
D
etector
Nanowire 50-100 nm wide NbTiN 3-10 nm thick
Sputtered NbTiN
PL/liftoff for contacts
Waveguides and SNSPD EBL ma-N 2400 series resist
PL for HF etch mask
Anders Liljeborg
Albanova NanoLab, KTH, SU.
