Sputnik 3 cm Ion Gun

Short user manual     Ion Gun, manufacturers manual

Power supply, manufacturers manual    Mass Flow Controller (MFC) manual, PDF

 

The Veeco Ion gun mounted on the "Sputnik" depositioning system.
From top to bottom:
  • Back end of the ion gun on its flange
  • On/off valve
  • Mass Flow Controller

Front panel of power supply / controller for the ion gun.

Anders Liljeborg Nanostructure Physics, KTH.