Removal Instructions

1. Raise the head to the top of its travel.
2. Move the chuck to the front left.
3. Remove the head.
4. Remove the clamps. probe and sample. Put the clamps and probe in the storage case.
5. Remove the terminal block and put it in the storage case.
6. Remove the two M3 cap screws [2.5 mm hex drive] that hold the chuck and put them in the storage case. See Figure 1.

Figure 1: Remove the two M3 x 8 mm socket head cap screws

7. Remove the chuck.
8. Disconnect the vacuum line from the microscope.
9. Remove the Backside Illumination Optics Assembly.
10. Move the Backside Illumination Optics Assembly X-Y stages to align the holes and insert the white plastic screws. Place the Backside Illumination Optics Assembly in the storage case.
11. Reinstall the alignment station. Push the alignment station to be flush with the stop. See Figure 2.

Figure 2: Install the alignment station

12. Check the taught position of the alignment station and re-teach if necessary.

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