Set Reference

The Set Stage Reference panel is used to set the origin point on the sample surface to be used for all subsequent Move To (X,Y) and Programmed Move operations. It is important to verify the reference point (0,0) with programmed move sequences, since all moves are relative to the current origin. For example, a program designed to move the stage to the four corners of a square sample when the origin (0, 0) is set to the upper-left corner will not probe the same positions if the origin is changed to the lower-right corner. Avoid confusion by selecting a standard position as the usual origin reference (e.g., lower-left corner), then reuse the same reference position with all samples.

On samples having a grid-like aspect (e.g., integrated circuits), the reference may be initially defined from a line (two points) rather than a single point. The reference line is defined parallel to some feature on the sample surface (e.g., an electronic trace on an integrated circuit). You may complete this by defining two points: an origin and a second point. Defining the second point compensates for sample rotation.

To set a reference origin on the sample:

1. Click the Focus Sample button in the Navigate View to focus on the sample.
2. Use the Navigate controls to move the sample to the desired origin.
3. Select Stage > Set References from the menu bar. This opens the Set Reference panel:

4. Select a coordinate system, either Cartesian (X,Y) or Polar (r, Theta).
5. Select the Set Origin option.
6. Click Mark Point as Origin to set the current stage position as the new origin.

To set a reference line on the sample, complete the following:

1. Follow steps 1 to 6 of the procedure above to set a new origin reference point on your sample.
2. Select the Axis Deskew option in the Set Reference window:

3. Use the trackball or navigation controls to move to the second reference point on the linear feature. This point and your origin will define the line of either the X or Y axis.
   • To set the X axis: Click the X-Axis button. This establishes the (Y = 0) reference line. 
   • To set the Y axis: Click the Y-Axis button. This establishes the (X = 0) reference line.

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