AJA II ATC2200 sputtering system

Responsible: Julien Zichi, Adrian Iovan

Main differences from AJA Orion:

• Three inch sputter targets
• Bigger main vacuum chamber
• Two magnetron sputter guns
• Only used for Ti and Nb in order to avoid cross contamination
• Process gases N₂, Ar, O₂
• Cryo pump instead of turbo pump on main chamber

Detailed instructions

Water cooling circuit, filter exchange, flow rate