Reactive Ion Etch (RIE)
with Inductive Coupled Plasma (ICP)
Operating Manual
Argon Plasma
The Argon plasma has a distinctive color which separates it from
other gas plasmas. The color balance of this image has not been changed,
it should be comparable with the images of the other plasmas.
Oxygen Plasma
Here is an oxygen plasma with both RIE and ICP active. Although the
image is slightly overexposed it is possible to see the color difference
to the argon plasma.
Oxygen Plasma, ICP
This is also the oxygen plasma seen from another angle. The ceramic tube
of the ICP can be seen glowing through the mesh of the top cover. The
coil of the ICP generating the magnetic field is surrounding the ceramic
tube.
Back to Introduction
Anders Liljeborg,
Nanostructure Physics, KTH.