Oxidation of nanopores
in a silicon membrane: self-limiting formation of sub-10 nm
circular openings
Miao Zhang, Torsten Schmidt, Fatemeh
Sangghaleh, Niclas Roxhed, Ilya Sychugov and Jan Linnros
Nanopore arrays in a
silicon membrane for parallel single-molecule detection: DNA
translocation
Miao Zhang, Torsten Schmidt, Anders Jemt, Pelin
Sahlén, Ilya Sychugov, Joakim Lundeberg and Jan Linnros
Nanopore arrays in
a silicon membrane for parallel single-molecule detection:
fabrication
Torsten Schmidt, Miao Zhang, Ilya Sychugov, Niclas Roxhed
and Jan Linnros