Fresnel lens made using grey scale ebeam lithography
Efficient proximity effect correction method based on multivariate adaptive regression splines for grayscale e-beam lithography
,
Wujun Mi, Peter Nillius,
2014 American Vacuum Society,
[http://dx.doi.org/10.1116/1.4875955]
Anders Liljeborg
Albanova Nanofabrication Lab, KTH, SU.