Advanced Realtime Recipe Techniques

Recipes is highly versatile in the kind of automated tasks it can control. This section will guide you through the process of creating recipes with specific use cases in mind.

• Multi-Site (Master/Slave) Recipe
  • Allows the user to control the scan parameters of many sites with a single set of measurement parameters. This is a highly attractive technique for managing large recipes with many sites on a single sample.
• Multi-Sample Recipe
  • Automates the task of imaging multiple samples. Ideal for taking a series of measurements on a batch of wafers. Recipe will prompt user to load/unload samples at the appropriate time.
• Site Re-Order Recipe
  • Control the order of which the programmed recipes sites are imaged with a simple comma delimited text file.

Open topic with navigation