If the manual valve is NOT closed, close it and wait
until the purge gas flow meter on the backside of the system
has gone down to zero.
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The flow meter is located at the left back-side of the cabinet.
Click picture for enlargement.
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The flow meter looks like this. Wait until the little ball has reached
the bottom of the vertical tube.
Click picture for enlargement.
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The manual purge valve
should always be closed except when running a process, i.e.
when a plasma is active in the chamber. Here is a condensed list
of how to use the manual valve, these steps are also included in this
manual further down.
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Leave it closed until just
before you start a recipe (etch-process).
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Open it before starting your recipe.
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After recipe stops, wait until base pressure is reached.
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Close the manual purge valve.
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Wait until flow-meter at the back has reached zero, it
takes about one minute.
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Then proceed with unloading.
If the chamber is not pumped,
you need to evacuate chamber first by:
- Click Stop button
- Click Evacuate button
- Wait for "at speed" text at turbo pump icon.
- Wait for "Penning" to show similar vacuum as in picture
above.
Note! You cannot vent to load sample unless you FIRST evacuate
so the turbo pump is at speed!
Press Vent button.
Venting will take about 2-3 minutes.
There are several automatic steps to ensure that no hazardous gases are left
in the chamber when opening it.
Load sample, note warning instructions.