Rod-feed E-gun deposition system "Sputnik"

Responsible: Taras Golod, Anders Liljeborg

It has options of cleaning sample prior to deposition with an ion-argon gun, and oxidation can be made via an oxygen-line attached to the load-lock part.

Venting is made of both load-lock and main chamber with Albanova central nitrogen supply.

Loading is done at the top load-lock and sample is lowered into center of main chamber with the vertical transfer rod at the top.

Deposition is made with the gate valve between load-lock and main chamber open, i.e. there is no actual transfer of samples as in the first deposition system.

Load / unload procedure

Important to rotate transfer rod before lifting, description.

Rod feed E-gun system, deposition procedure

Rod feed E-gun, manufacturers manual

Rod feed E-gun, schematic 1     schematic 2     schematic 3

3 cm Argon-ion-gun

Oerlikon Leybold T1600 turbo manual, replacing noisy Varian 2000 l/s turbo.

Venting and pump down of main chamber

(Argon-ion-gun, parameter settings removed from system)

Overview of deposition system

Load-lock door open

Liquid nitrogen used in the cryo-shroud surrounding the e-gun.

At the top: vent valve for load-lock
Middle: vacuum gauge for load-lock
Right: Valve for load-lock pump

Gate valve at the center, valve between load-lock and main chamber

Load-lock door open, sample holder can be seen inside load-lock.
Sample holder is easily removed, it is a snap-in fitting with
magnetic fastening.

Sample holder, similar clamps for sample as in Eurovac deposition system

Back-side of sample holder, note the three small balls that fit
into corresponding depressions in the base

Base of sample holder at end of transfer rod (in upper position).
Note the three depressions, it is very important that the holder is securely fitted into these.
The holding magnet can be seen at the center of the base.

On/off switch for load-lock pump mounted on wall

Load / unload procedure

Schematic overview, used for load/unload procedure

Load procedure

1. Close main chamber gate valve.
2. Check that load-lock pump valve is closed.
3. Loosen the locking screw of the load-lock door,
   this is to avoid overpressure at the end of venting the load-lock.
4. Slowly open load-lock vent valve.
5. Check the vacuum gauge, when it reaches E-2 mBar you can open the vent valve a bit more to quicken the venting.
6. When the load-lock door gets loose due to atmospheric pressure in load-lock, close the vent valve.
7. Open load-lock door and take out the sample holder. It is held in position by a magnet and three small balls fitting into corresponding depressions.
8. Mount your sample on the holder using clamps and screws.
9. Insert the sample holder on the transfer rod. Make sure the position is correct, i.e. the balls must fit into the depressions.
10. Close load-lock door and press it tight with the locking screw, so that the O-ring is touching the door everywhere. Do not over-tighten.
11. Open load-lock pump valve fully.
12. Start load-lock pump with power switch mounted on the wall.
13. Wait until vacuum gauge shows about 5E-3 mBar.
14. Close load-lock vent valve.
15. Open main chamber gate valve.
16. Shut off load-lock pump with switch mounted on wall.
17. Loosen the locking ring immediately under the ring of the transfer rod.
18. Slowly let the transfer rod sink down into the main chamber.
19. Let transfer rod ring rest on the lower stop ring.
    Warning: never loosen the lower stop ring!
    It is adjusted so that the sample holder is positioned at center of deposition beam.
20. Start depositing.

Always aim the pointer stick (green arrow) towards the back wall (direction of red arrow) before starting to lift the transfer rod.

1. Shut off E-gun system.
2. Rotate the transfer-rod so sample holder is facing away from E-gun, angle indicator at 180 deg. The pointer stick should be aimed at the back wall, see picture above.
3. Lift up transfer-rod to its top-most position and lock it there by tightening the lock-ring.
4. Close main chamber gate valve.
5. Check that load-lock pump valve is closed.
6. Loosen the locking screw of the load-lock door,
   this is to avoid overpressure at the end of venting the load-lock.
7. Slowly open load-lock vent valve.
8. Check the vacuum gauge, when it reaches E-2 mBar you can open the vent valve a bit more to quicken the venting.
9. When the load-lock door gets loose due to atmospheric pressure in load-lock, close the vent valve.
10. Open load-lock door and take out your sample on the sample holder.
11. Remove your sample from the sample holder.
12. Insert the sample holder on the transfer rod. Make sure the position is correct, i.e. the balls must fit into the depressions.
13. Close load-lock door and press it tight with the locking screw, so that the O-ring is touching the door everywhere. Do not over-tighten.
14. Open load-lock pump valve fully.
15. Start load-lock pump with power switch mounted on the wall.
16. Wait until vacuum gauge shows about 5E-3 mBar.
17. Close load-lock vent valve.
18. Open main chamber gate valve.
19. Shut off load-lock pump with switch mounted on wall.

View through view-port, 45-deg. mirror on top of cryo-shroud showing top of aluminum rod in e-gun.
At lower left is top of cryo-shroud (out-of-focus).
In approximate center is mirror (out-of-focus) showing top of e-gun with alu-rod.
Above and to right is the shutter seen edge-on (out-of-focus).
At the top is the sensor of the thickness monitor (out-of-focus).