Service Tools

Leak detector, Leybold Infinicon UL200 (pdf)

Leak detector, Pfeiffer HLT260 (pdf)

Heat exchanger (chiller) must start after power fail

Start of old heat exchanger (chiller) using water filter

Quality of compressed air
Quality of compressed air, 2:nd test

Ventilation units for Ebeam- and Deposition labs

General power failure, startup procedures