Scanning Capacitance Microscopy (SCM)

The following topics are discussed in this section:

• SCM Principles of Operation
  • Types of MIS Capacitor C-V Curves
• SCM Sample Mounting
• SCM Probe Selection and Mounting
• Software Selection
• Open Loop SCM Imaging
• Closed Loop SCM Imaging
• Sweep Commands
  • Sweeping Using the Generic Sweep Command
    • Tuning the SCM Sensor
    • Optimize the SCM Lock-In Phase
  • Ramping Using the Force Curve Command: dC/dV – V Spectra
• Additional Ramping Options

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